Apparatus and method for manufacturing substrates
US10823779B2 · kind B2 · utility
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13References
20Claims
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Key dates
| Filing date | Apr 27, 2018 |
| Grant date | Nov 3, 2020 |
| Priority date | — |
| Expiry date | Dec 23, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2808
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A substrate manufacturing apparatus includes a test apparatus including a test handler module for performing a test process on a substrate. The test handler module may include a conveyor unit to transfer a substrate, a handler unit for performing a test process on the substrate, and a transfer unit for transferring the substrate between the conveyor unit and the handler unit. The conveyor unit may include a feed conveyor and a discharge conveyor spaced apart from the feed conveyor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.