Microscope for imaging an object
US10823948B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 22, 2017 |
| Grant date | Nov 3, 2020 |
| Priority date | — |
| Expiry date | Nov 22, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/241
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A microscope for imaging an object, comprising a lens for imaging the object through an imaging beam path, a light source for generating illumination radiation, at least one optical element for coupling the illumination radiation into the imaging beam path such that a common beam path is formed between the optical element and the lens, wherein the imaging radiation path runs through the common beam path, and the illumination radiation is guided through the common beam path. The microscope also comprises a monitoring device for measuring an energy parameter of the illumination radiation, said monitoring device determining an energy parameter of radiation which is incident on the monitoring device, and a beam splitter device which is arranged in the common beam path upstream of the lens in the illuminating direction and couples measurement radiation out of the illumination radiation onto the monitoring device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.