Method and device for determining the position of an optical boundary surface along a first direction
US10832385B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 14, 2017 |
| Grant date | Nov 10, 2020 |
| Priority date | — |
| Expiry date | Jul 14, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/20056
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A method for determining the position of an optical boundary surface along a first direction includes a) imaging a pattern in a plane transverse to the first direction, and recording a two-dimensional image of the pattern imaged in the plane; b) repeating step a) for different positions in the first direction, wherein the different positions cover an area in the first direction in which the optical boundary surface lies; c) averaging each image from step a) along a direction transverse to the second direction such that in each case a one-dimensional data set is produced; d) transforming each data set from step c) into a frequency domain; e) determining the frequency of the greatest amplitude of all data sets transformed in step d); and f) determining the position along the first direction by evaluating the data sets transformed in step d) at the frequency determined in step e).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.