Patent · US Active

Apparatus and method for operating an apparatus

US10838307B2 · kind B2 · utility

1Cited by

1References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Markus Holz · Aalen, DE
Ulrich Bihr · Bopfingen, DE

Key dates

Filing date	Jul 23, 2019
Grant date	Nov 17, 2020
Priority date	—
Expiry date	Jul 23, 2039

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70491
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An apparatus, for example a lithography apparatus or a multi-mirror system, includes comprises a radiation source for generating radiation, a plurality of optical components for guiding the radiation in the apparatus, a plurality of actuator/sensor devices for the optical components, and a drive device for driving the actuator/sensor devices.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.