System and method for photocathode illumination inspection
US10840055B2 · kind B2 · utility
0Cited by
7References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 16, 2019 |
| Grant date | Nov 17, 2020 |
| Priority date | — |
| Expiry date | Jan 16, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/06333
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A high-brightness electron beam source is disclosed. The electron beam source may include a broadband illumination source configured to generate broadband illumination. A tunable spectral filter may be configured to filter the broadband illumination to provide filtered illumination having an excitation spectrum. The electron beam source may further include a photocathode configured to emit one or more electron beams in response to the filtered illumination, wherein emission from the photocathode is adjustable based on the excitation spectrum of the filtered illumination from the tunable spectral filter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.