Fabricating parabolic-shaped LEDs
US10840418B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 28, 2019 |
| Grant date | Nov 17, 2020 |
| Priority date | — |
| Expiry date | May 28, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/0363
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Systems and methods for fabricating parabolic LEDs are provided. The parabolic shape of the LEDs is precisely-controlled and highly-uniform across a substrate. By precisely controlling the shape, and providing a high-uniformity across the substrate, the luminance and process yield of the LEDs is enhanced. The precise-control and high-uniformity of the shape is enabled via a precisely-shaped and highly-uniform mask formed on the substrate. The ability to precisely-control both the shape and uniformity the mask is achieved by forming the mask utilizing three-dimensional (3D) patterning and/or machining methods. The mask includes a precisely-shaped boss with the same shape as the LED, and a cylindrical protrusion extending beyond the boss. The combination of the boss and cylindrical protrusion allows for the mask to be over-etched, without significantly effecting the shape of the LED. Thus, any non-uniformities etching process do not decrease the luminance, nor uniformity, of the LEDs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.