Mechanical shock detection and phase and frequency correction of a MEMS mirror

US10840922B1 · kind B1 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Philipp Stelzer · Graz, AT
• Norbert Druml · Graz, AT
• Christian Steger · Graz, AT
• Andreas Strasser · Graz, AT

Key dates

• Filing date: Jun 24, 2019
• Grant date: Nov 17, 2020
• Expiry date: Jun 24, 2039

Classification

• Technology area (CPC H): Electricity
• CPC primary: H03L7/087
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A system for driving a microelectromechanical system (MEMS) oscillating structure includes a phase error detector configured to generate a phase error signal based on measured event times and expected event times of the MEMS oscillating structure oscillating about a rotation axis; a disturbance event detector configured to detect a disturbance event based on the phase error signal and a disturbance threshold value; and a phase frequency detector (PFD) and correction circuit configured to, in response to the detected disturbance event, monitor for a plurality of measured crossing events of the MEMS oscillating structure oscillating about the rotation axis, generate a first compensation signal based on at least a first measured crossing event and a second measured crossing event to correct a frequency of the MEMS oscillating structure, and generate a second compensation signal based on a third measured crossing event to correct a phase of the MEMS oscillating structure.