Continuous spectra transmission pyrometry
US10845249B2 · kind B2 · utility
1Cited by
6References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 25, 2018 |
| Grant date | Nov 24, 2020 |
| Priority date | — |
| Expiry date | Feb 15, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B3/0038
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for processing substrates includes a continuum radiation source, a source manifold optically coupled to the continuum radiation source and comprising: a plurality of beam guides, each having a first end that optically couples the beam guide to the continuum radiation source; and a second end. The apparatus also includes a detector manifold to detect radiation originating from the source manifold and transmitted through a processing area, and one or more transmission pyrometers configured to analyze the source radiation and the transmitted radiation to determine an inferred temperature proximate the processing area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.