Method of defect detection on a specimen and system thereof
US10853932B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 16, 2019 |
| Grant date | Dec 1, 2020 |
| Priority date | — |
| Expiry date | Apr 28, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
There are provided a system and method of defect detection on a specimen, the method comprising: performing partitioning for each of one or more portions of a first die; receiving one or more noise maps indicative of noise distribution on second images captured for one or more portions of a second die; performing segmentation for each noise map in runtime, the segmentation for a given noise map including: calculating a score for each region, the given noise map aligned with the regions and each region is associated with noise data aligned therein, the score for a given region calculated at least based on the noise data associated therewith; and associating each region with one segmentation label of a predefined set of segmentation labels indicative of noise levels based on the score, thereby obtaining a set of segments each corresponding to one or more regions associated with the same segmentation label.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.