Contour extraction method, contour extraction device, and non-volatile recording medium
US10854419B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 27, 2019 |
| Grant date | Dec 1, 2020 |
| Priority date | — |
| Expiry date | May 26, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24578
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
According to one embodiment, a contour extraction method for extracting a contour of a target object from an image obtained using an electron beam includes: extracting the contour of the target object from a backscattered electron image; creating a dictionary for associating a secondary electron image obtained from a portion common to the backscattered electron image with the contour; calculating a likelihood of the contour of the target object in a plurality of positions of a newly obtained secondary electron image by referencing the dictionary regarding the newly obtained secondary electron image; and setting a route along which a total sum of the likelihood is maximized out of the plurality of positions as the contour of the target object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.