Patent · US Active

Wafer probe card integrated with a light source facing a device under test side and method of manufacturing

US10859625B2 · kind B2 · utility

0Cited by
9References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 21, 2018
Grant dateDec 8, 2020
Priority date—
Expiry dateJan 29, 2039

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R31/31908
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An integrated wafer probe card with a light source facing a device under test (DUT) side and enabling methodology are provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.