Patent · US Active

Chromatic confocal area sensor

US10866092B2 · kind B2 · utility

0Cited by

3References

18Claims

0Family size

Assignee

KLA-TENCOR CORPORATION · US

Inventors

Christophe Wouters · Balen, BE
Kristof Joris · Herk-de-Stad, BE
Johan De Greeve · Lovenjoel, BE

Key dates

Filing date	Jul 16, 2019
Grant date	Dec 15, 2020
Priority date	—
Expiry date	Jul 16, 2039

Classification

Technology area (CPC G)Physics
CPC primaryG01B2210/56
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

3D measurements of features on a workpiece, such as ball height, co-planarity, component thickness, or warpage, are determined. The system includes a broadband light source, a microlens array, a tunable color filter, a lens system, and a detector. The microlens array can focus a light beam to points in a focal plane of the microlens array. The tunable color filter can narrow the light beam to a band at a central wavelength. The lens system can provide longitudinal chromatic aberration whereby different wavelengths are imaged at different distances from the lens system.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.