Methods, systems, and apparatus for mass flow verification based on rate of pressure decay
US10866135B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 26, 2018 |
| Grant date | Dec 15, 2020 |
| Priority date | — |
| Expiry date | Oct 15, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67017
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Mass flow verification systems and apparatus verify mass flow rates of mass flow controllers (MFCs) based on pressure decay principles. Embodiments include a location for coupling a calibrated gas flow standard or a MFC to be tested in a line to receive a gas flow from a gas supply; a control volume serially coupled to the location in the line to receive the gas flow; a flow restrictor serially coupled to the control volume; a pump serially coupled to the flow restrictor; and a controller adapted to allow the gas supply to flow gas through the mass flow control verification system to achieve a stable pressure in the control volume, terminate the gas flow from the gas supply, and measure a rate of pressure decay in the control volume over time. Numerous additional aspects are disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.