Patent · US Active

Component for a projection exposure apparatus

US10866528B2 · kind B2 · utility

0Cited by

1References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Thomas Wolfsteiner · Aalen, DE
Stefan Krone · Aalen, DE
Volker Wieczorek · Neu-Ulm, DE
Lars Berger · Heubach, DE

Key dates

Filing date	Jul 1, 2019
Grant date	Dec 15, 2020
Priority date	—
Expiry date	Jul 1, 2039

Classification

Technology area (CPC G)Physics
CPC primaryG02B17/00
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A component for a projection exposure apparatus includes a printed circuit board arranged in an encapsulated housing and having electronic component parts, and a heat conducting structure for dissipating heat from the electronic component parts to an outer side of the housing.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.