Inventor · Heubach, DE

Lars Berger

12Patents
1h-index
31Co-inventors
54Inventor score

Filing activity: Jun 3, 2003 → Oct 6, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US7241265B2 Analyte testing device Emerging Cross-Sectional Technologies 371 Expired
US10983443B2 Control device for actuating an actuator unit of a lithography system, lithography system having a control device, and method for operating the control device Electricity 1 Active
US10130256B2 Medical device with optical transfer of data and optical reading device for receiving such data Physics 1 Active
US12276916B2 Drive device, optical system and lithography apparatus Physics 0 Active
US10437155B2 Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system Physics 0 Active
US7210331B2 Detecting element for determining the concentration of a gas component in a measuring gas, and method for manufacturing the detecting element Physics 0 Expired
US10663452B2 Data management unit for supporting health control Physics 0 Active
US10444633B2 Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system Physics 0 Active
US9033735B2 Contact plug for directly contacting a circuit board Electricity 0 Active
US9851554B2 Method for displacing at least one optical component Physics 0 Active
US11468042B2 Data management unit for supporting health control Physics 0 Active
US10866528B2 Component for a projection exposure apparatus Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.