Lars Berger
12Patents
1h-index
31Co-inventors
54Inventor score
Filing activity: Jun 3, 2003 → Oct 6, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7241265B2 | Analyte testing device | Emerging Cross-Sectional Technologies | 371 | Expired |
| US10983443B2 | Control device for actuating an actuator unit of a lithography system, lithography system having a control device, and method for operating the control device | Electricity | 1 | Active |
| US10130256B2 | Medical device with optical transfer of data and optical reading device for receiving such data | Physics | 1 | Active |
| US12276916B2 | Drive device, optical system and lithography apparatus | Physics | 0 | Active |
| US10437155B2 | Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system | Physics | 0 | Active |
| US7210331B2 | Detecting element for determining the concentration of a gas component in a measuring gas, and method for manufacturing the detecting element | Physics | 0 | Expired |
| US10663452B2 | Data management unit for supporting health control | Physics | 0 | Active |
| US10444633B2 | Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system | Physics | 0 | Active |
| US9033735B2 | Contact plug for directly contacting a circuit board | Electricity | 0 | Active |
| US9851554B2 | Method for displacing at least one optical component | Physics | 0 | Active |
| US11468042B2 | Data management unit for supporting health control | Physics | 0 | Active |
| US10866528B2 | Component for a projection exposure apparatus | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.