Circuit device including guard ring and method of forming guard ring
US10868112B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 9, 2018 |
| Grant date | Dec 15, 2020 |
| Priority date | — |
| Expiry date | Dec 1, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D89/601
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A circuit device includes core circuitry. The circuit device further includes a guard ring surrounding the core circuitry. The guard ring includes a first plurality of fin structures arranged in a first direction parallel to a first side of the core circuitry, wherein adjacent fin structures of the first plurality of fin structures are separated by a first distance. The guard ring further includes a second plurality of fin structures arranged in a second direction parallel to a second side of the core circuitry, wherein adjacent fin structures of the second plurality of fin structures are separated by a second distance, and the second distance is smaller than the first distance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.