Patent · US Active

Textured skin for chamber components

US10872749B2 · kind B2 · utility

0Cited by

1References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Gangadhar Sheelavant · Savanuru, IN
Cariappa Baduvamanda · Bengaluru, IN
Kaushik Vaidya · Savanuru, IN
Bopanna Ichettira VASANTHA · Bengaluru, IN

Key dates

Filing date	Jul 26, 2017
Grant date	Dec 22, 2020
Priority date	—
Expiry date	Jul 26, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3488
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A chamber component for a processing chamber is disclosed herein. In one embodiment, a chamber component for a processing chamber has a base component body. The base component body has an exterior surface configured to face a processing environment of the processing chamber. A textured skin is conformable to the exterior surface. The textured skin has a first side configured to be disposed against the exterior surface and a second side facing away from the first side. The second side has a plurality of engineered features configured to enhance adhesion of material deposited on the textured skin during use of the processing chamber.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.