Load port and method for carrying wafers
US10872799B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 24, 2017 |
| Grant date | Dec 22, 2020 |
| Priority date | — |
| Expiry date | Apr 24, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67742
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A load port including: a tabular portion which constitutes a part of a wall surface of a wafer carrying chamber and has an opening through which the wafer carrying chamber is opened; a mounting table on which a wafer storage container is mounted; a door section which can open and close the opening; a sucking tool which can suck and hold a lid; a latch which can fix and unfix a container main body and lid; and a latch driving mechanism storage section which stores a latch driving mechanism therein, load port being configured to enable setting an air pressure in latch driving mechanism storage section to be equal to the air pressure in a clean room or lower than the air pressure in clean room. Consequently, it is possible to provide the load port and a method for carrying wafers which can prevent dust from adhering to the wafers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.