Method and apparatus for removing debris from collector
US10875060B2 · kind B2 · utility
6Cited by
0References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 18, 2019 |
| Grant date | Dec 29, 2020 |
| Priority date | — |
| Expiry date | Apr 18, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K2201/064
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Debris is removed from a collector of an extreme ultraviolet light source vessel by applying a suction force through a vacuum opening of a cable. The method for removing debris also includes weakening debris attachment by using a sticky surface or by spreading a solution through a nozzle, wherein the sticky surface and the nozzle are arranged on the cable proximal to the vacuum opening. A borescope system and interchangeable rigid portions of the cable assists in targeting a target area of the collector where the debris is.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.