Inventor · Hsinchu, TW

Chia-Chen Chen

82Patents
9h-index
123Co-inventors
81Inventor score

Filing activity: Nov 9, 1998 → May 24, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US9869934B2 Collector in an extreme ultraviolet lithography system with optimal air curtain protection Electricity 139 Active
US8765582B2 Method for extreme ultraviolet electrostatic chuck with reduced clamp effect Electricity 92 Active
US8013983B2 Three-dimensional surround scanning device and method thereof Physics 53 Active
US9323059B2 Virtual image display apparatus Physics 28 Active
US9823585B2 EUV focus monitoring systems and methods Physics 27 Active
US9030529B2 Depth image acquiring device, system and method Electricity 13 Active
US6080659A Method to form an alignment mark Electricity 12 Expired
USD853195S1 Water kettle General 11 Active
US9377693B2 Collector in an extreme ultraviolet lithography system with optimal air curtain protection Electricity 10 Active
US8155774B2 3D object fabrication methods and systems Performing Operations; Transporting 9 Active
US7557812B2 Multilevel texture processing method for mapping multiple images onto 3D models Physics 8 Active
US9319660B2 Device for acquiring depth image, calibrating method and measuring method therefor Electricity 8 Active
US10875060B2 Method and apparatus for removing debris from collector Physics 6 Active
US6346456B2 Method of improving alignment for semiconductor fabrication Electricity 5 Expired
US7265761B2 Multilevel texture processing method for mapping multiple images onto 3D models Physics 4 Expired
US10459353B2 Lithography system with an embedded cleaning module Physics 4 Active
US10156794B1 Positioning device for aligning semiconductor tool and overhead hoist transport system Electricity 4 Active
US8269722B2 Gesture recognition system and method thereof Physics 4 Active
US11153984B1 Electronic apparatus Electricity 3 Active
US10775842B1 Portable electronic device Physics 3 Active
US10718718B2 EUV vessel inspection method and related system Electricity 3 Active
US9230330B2 Three dimensional sensing method and three dimensional sensing apparatus Electricity 3 Active
US10511310B2 Oven controlled crystal oscillator consisting of heater-embedded ceramic package Electricity 3 Active
US10719020B2 Droplet generator and method of servicing extreme ultraviolet radiation source apparatus Electricity 3 Active
US10429314B2 EUV vessel inspection method and related system Electricity 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.