Composition for surface treatment, and method for surface treatment using the same
US10876073B2 · kind B2 · utility
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13Claims
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Key dates
| Filing date | Jun 26, 2017 |
| Grant date | Dec 29, 2020 |
| Priority date | — |
| Expiry date | Aug 30, 2037 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC11D2111/22
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
The present invention is to provide a means with which foreign matters remaining on a surface of a polished object to be polished can be sufficiently removed. The present invention relates to a composition for surface treatment for a polished object to be polished, including: a (co)polymer containing a structural unit A having a phosphonic acid group and a divalent (poly)oxyhydrocarbon group or a salt thereof; and water, wherein a content of the structural units A exceeds 50% by mole relative to the total structural units forming the (co)polymer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.