Patent · US Active

Probes with fiducial targets, probe systems including the same, and associated methods

US10877070B2 · kind B2 · utility

1Cited by

11References

30Claims

0Family size

Assignee

FormFactor Beaverton, Inc. · US

Inventors

Joseph George Frankel · Beaverton, US
Koby L. Duckworth · Newberg, US
Kazuki Negishi · Hillsboro, US

Key dates

Filing date	Jan 16, 2019
Grant date	Dec 29, 2020
Priority date	—
Expiry date	Feb 1, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2224/81121
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Probes with fiducial targets, probe systems including the same, and associated methods. The probes include a probe body, a probe beam, a probe tip configured to contact a device under test (DUT), and a fiducial target affixed to the probe beam. The fiducial target is configured to be visible to an optical system to determine a position of the probe tip relative to the DUT. The methods include methods of utilizing and/or manufacturing the probes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.