Patent · US Active

Adaptive and context-aware micro-electro-mechanical systems (MEMS) mirror control

US10877264B2 · kind B2 · utility

0Cited by
7References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 20, 2018
Grant dateDec 29, 2020
Priority date
Expiry dateApr 20, 2039

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B26/105
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A system may include a micro-electro-mechanical systems (MEMS) mirror and a MEMS driver circuit. The MEMS driver circuit may obtain a plurality of items of monitoring information associated with the MEMS mirror. The plurality of items of monitoring information may include at least one of sensor information received from one or more sensors associated with the MEMS mirror, or operation information received from a controller associated with the system. The MEMS driver circuit may determine a state of the MEMS mirror based on the plurality of items of monitoring information. The MEMS driver circuit may adapt a mirror control parameter, associated with controlling the MEMS mirror, based on the state of the MEMS mirror.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.