Global dynamic detection method and system for protective film of photomask
US10877371B1 · kind B1 · utility
1Cited by
6References
10Claims
0Family size
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Key dates
| Filing date | Mar 23, 2020 |
| Grant date | Dec 29, 2020 |
| Priority date | — |
| Expiry date | Mar 23, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/95676
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A global dynamic detection method for a protective film of a photomask includes: causing the protective film to undergo broadband oscillation; applying a broadband signal to the protective film undergoing multi-frequency oscillation; transforming an optical time-domain signal reflecting off the protective film to obtain a frequency spectrum with multiple resonance frequencies; and detecting the protective film with the frequency spectrum comprehensively to ensure the quality of the protective film. A global dynamic detection system for use with the global dynamic detection method is further provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.