Fan-out antenna packaging structure and preparation thereof
US10886243B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 5, 2019 |
| Grant date | Jan 5, 2021 |
| Priority date | — |
| Expiry date | Nov 5, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/18161
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for preparing fan-out antenna packaging structure, includes: providing a carrier and a release layer structure; forming a single-layer antenna structure and a redistribution layer on an upper surface of the release layer; disposing a semiconductor chip electrically connected with the redistribution layer; forming a leading-out conducting wire on the redistribution layer at least on one side of the semiconductor chip; forming a plastic packaging layer wrapping the chip and the leading-out conducting wire; removing part of the plastic packaging layer to expose the chip and the leading-out conducting wire; forming an under-bump metal layer and a solder ball bump on an upper surface of the plastic packaging layer; removing the carrier and the release layer to expose the single-layer antenna structure; soldering a substrate on the solder ball bump; and forming a layer of cooling fins on a second surface of the semiconductor chip.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.