Methods for removing metal oxides
US10892183B2 · kind B2 · utility
0Cited by
35References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 1, 2019 |
| Grant date | Jan 12, 2021 |
| Priority date | — |
| Expiry date | Mar 1, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/76897
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Methods to remove metal oxides from substrate surfaces are described. Some embodiments of the disclosure utilize an aqueous alkaline solution to remove metal oxides from substrate surfaces using a wet method. Some embodiments of the disclosure are performed at atmospheric pressure and lower temperatures. Methods of forming self-aligned vias are also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.