Multiple integrated tips scanning probe microscope
US10895585B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 24, 2020 |
| Grant date | Jan 19, 2021 |
| Priority date | — |
| Expiry date | Feb 24, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q30/025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Device and system for characterizing samples using multiple integrated tips scanning probe microscopy. Multiple Integrated Tips (MiT) probes are comprised of two or more monolithically integrated and movable AFM tips positioned to within nm of each other, enabling unprecedented micro to nanoscale probing functionality in vacuum or ambient conditions. The tip structure is combined with capacitive comb structures offering laserless high-resolution electric-in electric-out actuation and sensing capability and novel integration with a Junction Field Effect Transistor for signal amplification and low-noise operation. This “platform-on-a-chip” approach is a paradigm shift relative to current technology based on single tips functionalized using stacks of supporting gear: lasers, nano-positioners and electronics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.