Patent · US Active

Photoacoustic sensor, method for checking a gas-tightness, and system

US10900932B2 · kind B2 · utility

0Cited by

2References

20Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Matthias Eberl · Schweinhub, DE
Franz Jost · Stuttgart, DE
Stefan Kolb · Unterschleißheim, DE

Key dates

Filing date	Nov 29, 2018
Grant date	Jan 26, 2021
Priority date	—
Expiry date	Apr 26, 2039

Classification

Technology area (CPC G)Physics
CPC primaryG01N2021/1708
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An example of a system comprises a volume filled with a gas, a gas excitation device configured to excite the gas inside the volume, a microphone configured to output a microphone signal on the basis of the gas excited by the gas excitation device, and a testing unit configured to take the microphone signal as a basis for testing a gas-tightness of the volume. An example of a photoacoustic sensor comprises a hermetically sealed sensor cell, a gas excitation device and a testing unit configured to take the microphone signal dependent on the thermally excited gas as a basis for testing a gas-tightness of the sensor cell. One example comprises a method for testing a gas-tightness of a volume filled with a gas.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.