Substrate processing device
US10910240B2 · kind B2 · utility
3Cited by
9References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 27, 2017 |
| Grant date | Feb 2, 2021 |
| Priority date | — |
| Expiry date | Jun 12, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67748
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A first transfer robot carries a substrate into and out of a container. A second transfer robot receives and delivers the substrate from and to the first transfer robot, and carries the substrate into and out of a first processing portion through a first exit/entrance port. A third transfer robot receives and delivers the substrate from and to the second transfer robot, carries the substrate into and out of a second processing portion through a second exit/entrance port, and carries the substrate into and out of a third processing portion through a third exit/entrance port.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.