Ryo MURAMOTO
21Patents
3h-index
23Co-inventors
59Inventor score
Filing activity: Mar 6, 2008 → Mar 8, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8033288B2 | Substrate treatment apparatus | Emerging Cross-Sectional Technologies | 12 | Active |
| US8851821B2 | Substrate processing apparatus and substrate conveying apparatus for use in the same | Emerging Cross-Sectional Technologies | 3 | Active |
| US8877076B2 | Substrate treatment apparatus and substrate treatment method | Chemistry; Metallurgy | 3 | Active |
| US10910240B2 | Substrate processing device | Electricity | 3 | Active |
| US10032654B2 | Substrate treatment apparatus | Chemistry; Metallurgy | 2 | Active |
| US9991141B2 | Substrate processing apparatus and heater cleaning method | Electricity | 2 | Active |
| US10573542B2 | Heater cleaning method | Electricity | 1 | Active |
| US10622242B2 | Substrate inverting device, substrate processing apparatus, and substrate supporting device, and substrate inverting method, substrate processing method, and substrate supporting method | Electricity | 1 | Active |
| US9059226B2 | Substrate treatment apparatus | Electricity | 1 | Active |
| US10249517B2 | Substrate processing apparatus | Electricity | 1 | Active |
| US9403187B2 | Substrate processing method and substrate processing apparatus | Electricity | 1 | Active |
| US9624046B2 | Substrate processing apparatus and substrate conveying apparatus for use in the same | Emerging Cross-Sectional Technologies | 1 | Active |
| US12042813B2 | Substrate processing method and substrate processing apparatus | Electricity | 0 | Active |
| US9340761B2 | Substrate processing method and substrate processing apparatus | Chemistry; Metallurgy | 0 | Active |
| US11101146B2 | Substrate processing apparatus | Electricity | 0 | Active |
| US11443972B2 | Substrate processing apparatus | Electricity | 0 | Active |
| US11211264B2 | Substrate processing apparatus and substrate processing method | Electricity | 0 | Active |
| US10964556B2 | Substrate processing apparatus, substrate processing system, and substrate processing method | Electricity | 0 | Active |
| US11961757B2 | Substrate holding apparatus and substrate processing apparatus | Electricity | 0 | Active |
| US10998220B2 | Substrate holding/rotating device, substrate processing apparatus including the same, and substrate processing method | Electricity | 0 | Active |
| US12431369B2 | Substrate processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.