Patent · US Active

Pivot apparatus for a micromirror, and illumination apparatus having a pivot apparatus for a micromirror

US10914937B2 · kind B2 · utility

0Cited by

6References

13Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Johannes Classen · Reutlingen, DE
Ralf Noltemeyer · Wernau, DE
Arnd Kaelberer · Neckargemünd, DE
Peter Sudy · Reutlingen, DE
Hans Artmann · Magstadt, DE

Key dates

Filing date	Aug 19, 2016
Grant date	Feb 9, 2021
Priority date	—
Expiry date	Oct 14, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG02B26/101
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A pivot apparatus, in particular a pivot apparatus for a micromirror, a fixed base frame being connected, directly or indirectly via an intermediate frame, to a pivotable carrier element. Spring elements having flexural springs are respectively disposed between the base frame and carrier element, base frame and intermediate frame, and intermediate frame and carrier element. The use of flexural springs enables good thermal coupling between the individual components, and an increase in robustness. The pivot apparatus can be embodied in particular as a microelectromechanical system.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.