Arnd Kaelberer
20Patents
3h-index
26Co-inventors
59Inventor score
Filing activity: Feb 25, 2003 → Jan 10, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9709451B2 | Micromechanical pressure sensor device and corresponding manufacturing method | Performing Operations; Transporting | 5 | Active |
| US8272268B2 | Triaxial acceleration sensor | Physics | 4 | Active |
| US7919346B2 | Micromechanical component and manufacturing method | Emerging Cross-Sectional Technologies | 3 | Active |
| US7878061B2 | Micromechanical system including a suspension and an electrode positioned movably | Physics | 3 | Active |
| US8461833B2 | Method for determining the sensitivity of an acceleration sensor or magnetic field sensor | Physics | 3 | Active |
| US9958348B2 | Micromechanical pressure sensor device and corresponding manufacturing method | Performing Operations; Transporting | 2 | Active |
| US8336382B2 | Acceleration sensor and method for its manufacture | Emerging Cross-Sectional Technologies | 2 | Active |
| US9097736B2 | Micromechanical component and method for manufacturing a micromechanical component | Emerging Cross-Sectional Technologies | 1 | Active |
| US9156675B2 | Micromechanical component and manufacturing method for a micromechanical component | Performing Operations; Transporting | 0 | Active |
| US7834452B2 | Device made of single-crystal silicon | Electricity | 0 | Active |
| US9606141B2 | Micromechanical sensor device | Emerging Cross-Sectional Technologies | 0 | Active |
| US9790084B2 | Micromechanical sensor device | Electricity | 0 | Active |
| US8573059B2 | Acceleration sensor having an electrode bridge | Physics | 0 | Active |
| US10914937B2 | Pivot apparatus for a micromirror, and illumination apparatus having a pivot apparatus for a micromirror | Physics | 0 | Active |
| US7495328B2 | Micromechanical component | Electricity | 0 | Active |
| US10020169B2 | Etching device and etching method | Electricity | 0 | Active |
| US8298962B2 | Device made of single-crystal silicon | Electricity | 0 | Active |
| US10427937B2 | Method for producing a multilayer MEMS component, and corresponding multilayer MEMS component | Performing Operations; Transporting | 0 | Active |
| US7081592B2 | Micromechanical switch | Electricity | 0 | Expired |
| US9932223B2 | Method for manufacturing microelectromechanical structures in a layer sequence and a corresponding electronic component having a microelectromechanical structure | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.