Patent · US Active

Packaged MEMS device with disturbance compensation

US10921206B2 · kind B2 · utility

0Cited by

4References

20Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Benjamin Kollmitzer · Graz, AT
Franz Michael Darrer · Graz, AT
Philipp Greiner · Graz, AT
Marcus Hennecke · Ulm, DE
Walter Schuchter · Graz, AT
Christoph Steiner · Sankt Margarethen an der Raab, AT

Key dates

Filing date	Aug 20, 2018
Grant date	Feb 16, 2021
Priority date	—
Expiry date	Apr 13, 2039

Classification

Technology area (CPC G)Physics
CPC primaryG01L19/06
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Disclosed is an apparatus which has, among other things, a MEMS device with a first measurement arrangement for capturing a measurement variable (X1) based on a physical variable, which has a useful variable component (N1) and a first disturbance variable component (Z1), and a second measurement arrangement for capturing a second disturbance variable component (Z2). The apparatus furthermore has a disturbance compensation circuit which is configured to combine the second disturbance variable component (Z2) and the measurement variable (X1) with one another and to obtain a disturbance-compensated measurement variable (Xcomp). The MEMS device is arranged in a housing, wherein the MEMS device is in immediate mechanical contact with the housing by way of at least 50% of a MEMS device surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.