Patent · US Active

Microelectromechanical transducer

US10926999B2 · kind B2 · utility

0Cited by

2References

27Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Christian Bretthauer · Munich, DE
Alfons Dehe · Reutlingen, DE
Alfred Sigi · Sinzing, DE

Key dates

Filing date	Aug 14, 2019
Grant date	Feb 23, 2021
Priority date	—
Expiry date	Aug 14, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2217/01
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

In accordance with an embodiment, a microelectromechanical transducer includes a displaceable membrane having an undulated section comprising at least one undulation trough and at least one undulation peak and a plurality of piezoelectric unit cells. At least one piezoelectric unit cell is provided in each case in at least one undulation trough and at least one undulation peak, where each piezoelectric unit cell has a piezoelectric layer and at least one electrode in electrical contact with the piezoelectric layer. The membrane may be formed as a planar component having a substantially larger extent in a first and a second spatial direction, which are orthogonal to one another, than in a third spatial direction, which is orthogonal to the first and the second spatial direction and defines an axial direction of the membrane.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.