Patent · US Active

Device and method for measuring a surface topography, and calibration method

US10935372B2 · kind B2 · utility

1Cited by

4References

15Claims

0Family size

Assignee

Carl Zeiss AG · DE

Inventors

Lars Omlor · Dublin, US
Carsten Glasenapp · Oberkochen, DE

Key dates

Filing date	Oct 8, 2018
Grant date	Mar 2, 2021
Priority date	—
Expiry date	Oct 8, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG06T2207/30108
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method and a device for measuring the topography and/or the gradients and/or the curvature of an optically active surface of an object are disclosed. The device allows the object to be arranged in a receiving region with a contact surface for contact with the object. Inside the device, there is a plurality of point light sources that provide light that is reflected at the surface to be measured of an object arranged in the receiving region. The device includes at least one camera with an objective assembly and an image sensor for detecting a brightness distribution which is produced on a light sensor by the light of the point light sources reflected at the surface to be measured.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.