Patent · US Active

Image evaluation method and image evaluation device

US10937146B2 · kind B2 · utility

3Cited by
3References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 18, 2019
Grant dateMar 2, 2021
Priority date
Expiry dateMay 26, 2039

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG06T2207/30148
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

The image evaluation device includes a design data image generation unit that images design data; a machine learning unit that creates a model for generating a design data image from an inspection target image, using the design data image as a teacher and using the inspection target image corresponding to the design data image; a design data prediction image generation unit that predicts the design data image from the inspection target image, using the model created by the machine learning unit; a design data image generation unit that images the design data corresponding to the inspection target image; and a comparison unit that compares a design data prediction image generated by the design data prediction image generation unit and the design data image. As a result, it is possible to detect a systematic defect without using a defect image and generating misinformation frequently.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.