Determining susceptor service life in a plasma processing chamber
US10937637B2 · kind B2 · utility
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3References
21Claims
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Inventor
Key dates
| Filing date | Aug 31, 2017 |
| Grant date | Mar 2, 2021 |
| Priority date | — |
| Expiry date | Mar 25, 2039 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P80/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In one embodiment of the invention, a method for predicting a susceptor's service life in a processing chamber is disclosed. The method begins by creating virtual sensors in a processing chamber having a susceptor. The virtual sensors monitor one or more parameters on the susceptor and the age of the susceptor is tracked throughout the susceptor's life in the processing chamber with the virtual sensors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.