Heating device and heating chamber

US10937672B2 · kind B2 · utility

Assignee

• BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD. · CN

Inventors

• Jun Zhang · Beijing, CN
• Xuewei Wu · Beijing, CN
• Boyu DONG · Beijing, CN
• Baogang Xu · Beijing, CN
• Henan Zhang · Albany, US
• Bingliang GUO · Beijing, CN
• Wen Zhang · Deyang, CN
• Shaohui Liu · Changchun, CN

Key dates

• Filing date: Dec 30, 2015
• Grant date: Mar 2, 2021
• Expiry date: Jan 1, 2038

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/68792
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A heating device and a heating chamber are provided, comprising a base plate (21), at least three supporting columns (22) and a heating assembly, where the at least three supporting columns are arranged vertically on the base plate and are distributed at intervals along a circumferential direction of the base plate Top ends of the at least three supporting columns form a bearing surface for supporting a to-be-heated member (23). The heating assembly includes a heating light tube (24) and a thermal radiation shielding assembly, where the heating light tube is disposed above the base plate and below the bearing surface. A projection of an effective heating area formed by uniform distribution of the heating light tube on the base plate covers a projection of the bearing surface on the base plate. The thermal radiation shielding assembly shields heat radiated by the heating light tube towards surroundings and bottom.