Boyu DONG
7Patents
1h-index
23Co-inventors
43Inventor score
Filing activity: Oct 23, 2013 → Oct 20, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9362129B2 | Polishing apparatus and polishing method | Electricity | 4 | Active |
| US10640862B2 | Method for forming film and method for forming aluminum nitride film | Electricity | 1 | Active |
| US10643843B2 | Film forming method and aluminum nitride film forming method for semiconductor apparatus | Electricity | 1 | Active |
| US10937672B2 | Heating device and heating chamber | Electricity | 1 | Active |
| US11710624B2 | Sputtering method | Chemistry; Metallurgy | 0 | Active |
| US11315768B2 | Loading apparatus and physical vapor deposition apparatus | Electricity | 0 | Active |
| US10984994B2 | Deposition apparatus and physical vapor deposition chamber | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.