Paddle, plating apparatus equipped with the paddle, and plating method
US10946351B2 · kind B2 · utility
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1References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 2, 2018 |
| Grant date | Mar 16, 2021 |
| Priority date | — |
| Expiry date | Jun 1, 2038 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC25D21/12
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A paddle for agitating a plating solution by reciprocating parallel to a surface of a substrate is disclosed. The paddle includes a plurality of vertically-extending agitation rods. Each agitation rod includes: a planar portion perpendicular to a reciprocating direction of the paddle; two slope surfaces extending from side ends of the planar portion in directions closer to each other, the two slope surfaces being symmetric with respect to a center line of the agitation rod, the center line being perpendicular to the planar portion; and a tip portion connected with the two slope surfaces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.