Sample inspection apparatus employing a diffraction detector
US10948432B2 · kind B2 · utility
2Cited by
1References
8Claims
0Family size
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Key dates
| Filing date | Aug 23, 2019 |
| Grant date | Mar 16, 2021 |
| Priority date | — |
| Expiry date | Aug 23, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/205
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sample inspection apparatus irradiates a sample with a conical shell of X-ray or similar radiation generating a plurality of Debye rings originating from a circular path on the sample. The apparatus is provided with two detectors. A first detector receives diffracted radiation and a second detector receives radiation which is transmitted through a coded aperture provided at a detection surface of the first detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.