Methods of determining process models by machine learning
US10948831B2 · kind B2 · utility
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22Claims
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Key dates
| Filing date | Feb 20, 2018 |
| Grant date | Mar 16, 2021 |
| Priority date | — |
| Expiry date | Feb 20, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06V10/7784
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Methods of determining, and using, a patterning process model that is a machine learning model. The process model is trained partially based on simulation or based on a non-machine learning model. The training data may include inputs obtained from a design layout, patterning process measurements, and image measurements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.