Substrate transfer robot and automatic teaching method
US10953539B2 · kind B2 · utility
2Cited by
1References
5Claims
0Family size
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Key dates
| Filing date | Dec 27, 2018 |
| Grant date | Mar 23, 2021 |
| Priority date | — |
| Expiry date | Jun 27, 2039 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A substrate transfer robot, first and second sensors are provided in a hand such that a planar-view intersection point of optical axes is located on a center of a substrate when the hand holds the substrate in planar view, and a control device operates an arm, scans a target placed at a teaching position with the first and second sensors, and acquires the teaching position when the target is located at the planar-view intersection point of the optical axes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.