Probe card alignment

US10955440B2 · kind B2 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Martin Eckert · Metzingen, DE
• Roland Dieterle · St. Georgen, DE
• Siegfried Tomaschko · Neustadt, DE

Key dates

• Filing date: Sep 5, 2019
• Grant date: Mar 23, 2021
• Expiry date: Sep 5, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/2891
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An adjustable load transmitter for adjusting an alignment between a probe card and a bridge beam of a wafer prober, where the probe card is separated from the bridge beam by a gap. The adjustable load transmitter located in the gap, the adjustable load transmitter comprising two rotatable plates adapted for transmitting a load via a load transmission path between the bridge beam and the wafer prober and each comprising two flat, non-parallel contact faces. The adjustable load transmitter removes an angular misalignment between the bridge beam and the set of plates by rotating each of the rotatable plates about a pre-determined adjustment angle such that two angles of inclination are adjusted to zero. The adjustable load transmitter establishes the load transmission path by closing a clearance between the bridge beam and the contact face.