Fluid control device, recording medium recorded with control program, and control method
US10969019B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 6, 2018 |
| Grant date | Apr 6, 2021 |
| Priority date | — |
| Expiry date | Sep 9, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0635
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Provided is a fluid control device that achieves high sealing performance at full closure, and can suppress damage to a valve body or a valve seat surface even without mechanical accuracy improvements. The fluid control device includes: a fluid control valve provided in a flow path through which fluid flows: and a control mechanism that controls the fluid control valve. The fluid control valve includes: a valve seat surface; a valve body that contacts and separates from the valve seat surface; and an actuator that drives the valve body. Further, the control mechanism includes a speed adjustment part that when the valve body is brought close to the valve seat surface in order to fully close the fluid control valve, and the valve seat surface and the valve body reach a predetermined distance apart, reduces the moving speed of the valve body more than before reaching the predetermined distance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.