High speed atomic force profilometry of large areas
US10969406B2 · kind B2 · utility
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19Claims
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Key dates
| Filing date | Aug 12, 2019 |
| Grant date | Apr 6, 2021 |
| Priority date | — |
| Expiry date | Aug 12, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q20/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method of operating an atomic force profiler (AFP), such as an AFM, using a feedforward control signal in subsequent scan lines of a large area sample to achieve large throughput advantages in, for example, automated applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.