Guard ring monitor
US10969422B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 16, 2018 |
| Grant date | Apr 6, 2021 |
| Priority date | — |
| Expiry date | Apr 24, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L23/585
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An embodiment of the invention may include a method and structure for determining a failure in a guard ring of a chip. The method may include measuring a current frequency of oscillation of a crack check circuit located within a guard ring. The method may include comparing the frequency to a baseline frequency of oscillation of the crack check circuit. The current frequency and baseline frequency may be normalized using a set of bypass lines. The method may include determining there is a failure of the guard ring based on the difference between the normalized frequency of oscillation and the baseline normalized frequency of oscillation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.