Patent · US Active

Guard ring monitor

US10969422B2 · kind B2 · utility

0Cited by
6References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 16, 2018
Grant dateApr 6, 2021
Priority date
Expiry dateApr 24, 2039

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L23/585
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An embodiment of the invention may include a method and structure for determining a failure in a guard ring of a chip. The method may include measuring a current frequency of oscillation of a crack check circuit located within a guard ring. The method may include comparing the frequency to a baseline frequency of oscillation of the crack check circuit. The current frequency and baseline frequency may be normalized using a set of bypass lines. The method may include determining there is a failure of the guard ring based on the difference between the normalized frequency of oscillation and the baseline normalized frequency of oscillation.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.