Patent · US Active

Method for dimensional x-ray measurement, in particular by computed tomography, and x-ray computed tomography scanner

US10983072B2 · kind B2 · utility

1Cited by
1References
12Claims
0Family size

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Key dates

Filing dateFeb 2, 2018
Grant dateApr 20, 2021
Priority date
Expiry dateFeb 2, 2038

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG06T2207/30108
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The invention relates to a method for dimensional measurement by way of X-ray computed tomography, featuring the steps (a) Irradiating a test object (26) with non-monochromatic X-ray radiation from a virtually punctiform X-ray source (12), (b) measuring the intensity (I) of the X-ray radiation (22) in the radiation path behind the test object (26) by means of a detector (14) which has a plurality of pixels (P) to obtain pixel-dependent intensity data (I(P)), and (c) calculating at least one dimension (H) of the test object (26) using the pixel-dependent intensity data (I(P)). According to the invention, the pixel-dependent intensity data (I(P)) is corrected by the influence of an effective penetration depth (τ) on the detector and/or a displacement of the effective source location (Q) on a target (20) of the X-ray source (12).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.