Recipe creation device for use in semiconductor measurement device or semiconductor inspection device
US10984143B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 23, 2015 |
| Grant date | Apr 20, 2021 |
| Priority date | — |
| Expiry date | Jan 23, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
The purpose of the present invention is to provide a recipe creation device, with the goal of using past recipe data in order to highly efficiently create recipes. As an embodiment with which to achieve this goal, there is provided a recipe creation device comprising an arithmetic processing device that, on the basis of design data for a semiconductor element, establishes measurement conditions or inspection conditions by a semiconductor measurement device or a semiconductor inspection device, wherein the arithmetic processing device is configured to be able to access a database in which the measurement conditions or inspection conditions, and the pattern information of the semiconductor element, are stored in associated form, and the measurement conditions or inspection conditions are selected through a search using pattern information of the semiconductor element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.