Airborne molecular contamination filter cartridge system with combustible filter cartridge and reusable frame
US10987612B2 · kind B2 · utility
0Cited by
10References
12Claims
0Family size
Assignee
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Key dates
| Filing date | Apr 28, 2017 |
| Grant date | Apr 27, 2021 |
| Priority date | — |
| Expiry date | Oct 29, 2037 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2279/51
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Filters for semiconductor tool and clean room applications to control airborne molecular contamination. The filter cartridge system includes a filter cartridge having a non-woven fiber and at least one adsorbent. In some embodiments, the filter cartridge is constructed of substantially combustible materials to support its end of service destruction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.